发明名称 Method for producing an ultra fine powder and a coating - with a carrier gas stream contg. two perpendicular constituent streams superimposed on one another in front of the target surface undergoing ablation
摘要 <p>The method concerns prodn. of an ultra fine powder by laser beam ablation from a target. Ablation of the target material takes place in a carrier gas stream made up of constituent, mutually perpendicular streams (10a, 10b) superimposed on one another directly in front of the target (2). The surface normal of the target forms an angle of 80 - 40[deg] with the stream (10a) and an angle of 10 - 50[deg] with the stream (10b). At the same time, the ratio of the mass flow of the stream (10b) to that of the stream (10a) is greater than 1. Also claimed is a method for producing a coating made up of an ultra fine powder.</p>
申请公布号 DE19525159(A1) 申请公布日期 1997.01.16
申请号 DE1995125159 申请日期 1995.07.11
申请人 PHILIPS PATENTVERWALTUNG GMBH, 22335 HAMBURG, DE 发明人 GAERTNER, GEORG, DR.RER.NAT., 52078 AACHEN, DE;JANIEL, PETER, ING.(GRAD.), 52146 WUERSELEN, DE
分类号 C23C14/28;H01J9/02;(IPC1-7):C23C14/28 主分类号 C23C14/28
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