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发明名称
Photometrisches Gerät mit einem Festkörperbildsensor
摘要
申请公布号
DE68926990(T2)
申请公布日期
1997.01.16
申请号
DE19896026990T
申请日期
1989.10.18
申请人
NIKON CORP., TOKIO/TOKYO, JP
发明人
JUEN, MASAHIRO 602 GURINPURAZA MUTSUURA, YOKOHAMA-SHI KANAGAWA-KEN, JP
分类号
G01J1/02;G01J1/44;G01J1/46;H01L27/148;H01L31/10;H04N5/235;H04N5/335;H04N5/351;H04N5/353;H04N5/369;H04N5/3728;(IPC1-7):H01L27/148
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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