| 摘要 |
PURPOSE: To provide a laser beam machine which executes laser processing with a low cost and a high grade by efficiently executing processing of the inside of grooves and executing processing without affecting the other parts. CONSTITUTION: The laser beam processing of the electrodes 9 formed within the grooves of a piezoelectric ceramic substrate 1 is continued by scanning these electrodes at a high speed with a YAG laser beam 10 by oscillation of two sets of scanning mirrors 12, 13 when the incident angle in the incident route of the YAG laser beam 10 is within a prescribed angle range. The position of the piezoelectric ceramic substrate 1 is moved by a precision table 18 to adjust the incident angle to the regulated angle range if the incident angle of the YAG laser beam 10 deviates from the prescribed angle range. The laser beam processing is thereafter continued by the oscillation of the scanning mirror 12. |
