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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0913169(A)
申请公布日期
1997.01.14
申请号
JP19950163166
申请日期
1995.06.29
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NISHIHARA MUNEKAZU;KIMURA TEIICHI;AOKURA ISAMU
分类号
C23C14/34;C23C14/35;H01J37/34;H01L21/203;H01L21/31;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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