| 摘要 |
PURPOSE: To provide a laser beam processing method and a laser beam machine capable of easily washing a sample surface without requiring intricate stages and decreasing the deposits formed on this sample surface. CONSTITUTION: An X-Y-Z stage 6 is risen in an optical axis direction and the surface of the sample 5 is again irradiated with the laser beam 2 in a defocusing state in the laser beam processing method for executing the removal of the prescribed surface region of the sample 5 contg. an org. high-polymer material by irradiating the sample 5 with the laser beam 2. As a result, the region larger than the region including the prescribed surface region of the surface of the sample 5 is irradiated with the laser beam 2. |
