METHOD FOR CUTTING FUSE WIRING OF INTEGRATED CIRCUIT

摘要

PURPOSE: To provide a method capable of stably cutting fuse wirings without increasing the irradiation quantity of a laser beam. CONSTITUTION: An integrated circuit chip 2 having the fuse wirings cuttable by the irradiation with the laser beam is arranged in a vacuum evacuatable vessel. The inside of this vacuum is so evacuated that a pressure lower than the atm. pressure is attained in the vessel. The fuse wirings are cut by irradiating the fuse wirings with the laser beam.