SURFACE FINISH PROCESS METHOD

摘要

PURPOSE: To provide a surface finish process method effective in the removal of loading in a thin hole in a precision workpiece and others. CONSTITUTION: A thin through hole 12 portion formed in a ceramic cap 11 is immersed in HR fluid 14. Electrodes 14, 15 are disposed respectively above and below the ER fluid 13 and an electric field is applied to the electrodes, while vibrations are giving between the ER fluid 13 and ceramic cap 11 by a vibrator 18. Fine granular clusters in the ER fluid 13 are formed in the thin through hole 12 of the ceramic cap 11 in parallel to the thin through hole 12 and the clusters act as a lapping rod to carry out the finish process for the inner surface of the thin through hole 12.