发明名称 CHUCK EQUIPMENT
摘要 PURPOSE: To provide a chuck equipment which does not break or flip free of breakdown and a fragile work and can grip or transfer the work smoothly. CONSTITUTION: An on-off valve 26 is opened, and air is supplied to an air tube 24 from a compressor 25. The air tube 24 is inflated to leave the tips of plate segments 23A, 23B open. A work table 11 is made to ascend to bring a work 13 between the plate segments. Then the on-off valve 26 is closed. Hence the work 13 is gripped between the plate segments 23A and 23B. Thereby the work can be clamped by a suitable force. Further the gripping operation of the work can be automated.
申请公布号 JPH098099(A) 申请公布日期 1997.01.10
申请号 JP19950180861 申请日期 1995.06.23
申请人 ROHM CO LTD 发明人 SHIMADA NAOTO
分类号 B25J15/08;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B25J15/08
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