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发明名称
FRONT AND REAR POSITION ALIGNING JIG FOR PHOTOMASK
摘要
申请公布号
JPH098193(A)
申请公布日期
1997.01.10
申请号
JP19950157865
申请日期
1995.06.23
申请人
HITACHI CABLE LTD
发明人
SATO MANABU
分类号
G03F9/00;H01L23/50;(IPC1-7):H01L23/50
主分类号
G03F9/00
代理机构
代理人
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