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经营范围
发明名称
SUBSTRATE HEATER
摘要
申请公布号
JPH097913(A)
申请公布日期
1997.01.10
申请号
JP19950155972
申请日期
1995.06.22
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
MATSUSHITA MASANAO;SASADA SHIGERU;FUKUTOMI YOSHIMITSU
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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