发明名称 PARTITIONING WALL FORMING GLASS BASE AND MANUFACTURE OF IT
摘要 PURPOSE: To reduce a partitioning wall forming cost to fine the partitioning wall width, by constituting a partitioning wall layer, formed on a glass base board, of the sintered body of a thin plate state glass fine particle. CONSTITUTION: The partitioning wall 2 of a fine particle, composed of thin plate state glass having a thickness of 2μm or thinner, is formed on a glass base board 1. Coating liquid, prepared by blending photosensitive resin and an organic solvent, is applied to a thin plate state glass fine particle to be dried. Ultraviolet light 6 is irradiated to the glass base board 1 via a photomask 5 to make the photosensitive resin be sensitized. A resultant is developed to remove an unnecessary part to be baked and sintered, thereby obtaining a partitioning wall forming glass plate. When a thin plate state glass fine particle is used as a glass fine particle in the coating liquid, since the glass fine particle is arranged in a direction parallel to the base board 1 at the time of coating, the ultraviolet light becomes difficult to be expanded in a direction other than an irradiation part in an exposure process, and the attenuation of the ultraviolet light is reduced in a thickness direction, thereby a fine partitioning wall, having high height and narrow width, can be formed.
申请公布号 JPH097526(A) 申请公布日期 1997.01.10
申请号 JP19950159265 申请日期 1995.06.26
申请人 ASAHI GLASS CO LTD 发明人 ISEDA TORU
分类号 H01J9/24;H01J9/02;H01J11/22;H01J11/34;H01J11/36;H01J17/16 主分类号 H01J9/24
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