| 摘要 |
PURPOSE: To suppress the oxidation on the surface of an electrode for vibration proof after a heat-treatment and to prevent the degradation of a vibrator charac teristic and the lowering of a Ci value, by making the electrode for vibration proof of a vibration part have a constitution that a Ti layer is provided under an Au layer. CONSTITUTION: By providing Ti layers 8b and 9b under Au layers 8a and 9a in electrodes for vibration proof, the oxidation on the surface by a heat- treatment is suppressed. At this time, the degradation of a Ci value can be further suppressed by making Ti film thickness 500 angstrom or below. By performing the heat-treatment in high vacuum atomosphere which is 5.0×10<-5> torr or below, the diffusion of the lower Ti layer to the surface and the oxidation can be further suppressed. Because Ti is difficult to diffuse in Au and to oxidize on the surface as compared with Cr, the oxidation on the surface of the electrode for vibration proof can be suppressed by the heat- treatment. As a result, a projection can not be produced on the surface of the electrode for vibration proof after the heat-treatment and the degradation of the vibration characteristic of a vibrator can be prevented.
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