| 摘要 |
FIELD: manufacture of integrated-circuit microdisplacement transducers, electronic safety systems for transport, navigation system, and moving object observing facilities. SUBSTANCE: integrated circuit of microdisplacement transducer is sensing element made in the form of cantilever within material of semiconductor substrate with permanent magnets placed under structures of magnet-sensing components formed within material of additional semiconductor substrate built integral with first substrate. EFFECT: improved design. 4 cl, 1 dwg |
