| 摘要 |
PURPOSE: To provide a method which enables detection of a trace element existing in the surface of a sample with high sensitivity and further enables detection of a surface element of the sample without providing a vacuum. CONSTITUTION: A ray of proton having an energy of 3.5MeV irradiates a sample surface at a small angle of 1 deg. or less, so as to excite an inner-shell electron, and a characteristic X ray generated when the electron returns to a normal state is detected. Thereby the kind and the quantity of a trace element existing in the sample surface. |
