发明名称 HIGH-CONDUCTIVITY REGION IN INTEGRATED CIRCUIT; STENCIL HEATING
摘要 FIELD: microelectronics. SUBSTANCE: first invention is concerned with integrated circuit each of whose components has one high-conductivity region inscribed with its entire parallelepiped shape into this component or enters it. High-conductivity region inside its respective component of integrated circuit not go onto the surface of semiconductor plate of integrated circuit nor does it go beyond interface of p-n junction regions or entire form of component with purely semiconductor part of integrated circuit plate. High-conductivity region also crosses with its entire form all p-n junctions of its respective component and junction proper crosses both emitter region and high-conductivity region while retaining its working function inside high-conductivity region. High-conductivity region, which is first invention here, has high-conductivity chemical element of almost ideal peripheral lattice structure and doped semiconductor particles. The latter are introduced in high-conductivity region to maintain normal functions of each element function. For easy peripheral passage of current, particles are spaced apart and separately introduced. For shaping first invention, use is made of second one or stencil with very small openings for high-conductivity regions. Second invention is method for gradual uniform heating of stencil to eliminate mold, structure, linear chipping and destruction. EFFECT: reduced resistance and increased speed of response in integrated circuits without increasing degree of integration.
申请公布号 RU94028131(A) 申请公布日期 1997.01.10
申请号 RU19940028131 申请日期 1994.07.18
申请人 EPISHKIN A.N. 发明人 EPISHKIN A.N.
分类号 H01L27/02 主分类号 H01L27/02
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