| 摘要 |
PURPOSE: To improve resolution of a laser length measurement system by carrying out wavelength separation of both laser beams, projecting separated laser beams respectively to both corner cubes, and respectively making reflected beams of these laser beams reflected. CONSTITUTION: Laser beams L with wavelengthλ1 ,λ2 from a laser light source 641 are separated into beams with different wavelength by HBS 731, and the beams with wavelengthλ1 enter a corner cube 72a, and are reflected, and the reflected beams turn back to the cube 72a. Independently of the rotary position of the cube 72a, the re-reflected beams are transmitted through the HBS while the optical axis of the reflected beams being kept constantly the same as the optical axis of the laser beams in the outward way. Also, the beams with wavelengthλ2 are reflected by a plane mirror 733, enter a corner cube 72b, are reflected, and the reflected beams turn back to the cube 72b. The re-reflected beams enter the HBS and are reflected while the optical axis of the re-reflected beams being kept constantly the same as that of the laser beams in the outward way in the same manner. Both re-reflected beams transmitted or reflected through or by the HBS 731 are received by a photoreceiver 643 while their interference waves being synthesized well and the length is measured by a distance measuring part 644.
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