| 摘要 |
PURPOSE: To provide an object floating equipment and an object conveying equipment which can convey an object like a wafer in the state of complete noncontact, is capable of conveyance not only in the horizontal direction but also in the vertical direction and the oblique direction, can freely change the direction, and is free from the limitation of carriage path. CONSTITUTION: In order to float an object 20, a vibrator 15 generates sonic waves. The radiation pressure of the sonic waves is made large in the peripheral part of the vibrator as compared with the central part. Thereby the object is kept still in the central part of the vibrator. The vibrator is conveyed in a suitable direction by a conveying means such an arm system robot 3 and an elevator. |
