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发明名称
ETCHER FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
JPH098012(A)
申请公布日期
1997.01.10
申请号
JP19950178099
申请日期
1995.06.21
申请人
SONY CORP
发明人
NOGAMI YOICHI
分类号
C23F4/00;H01L21/00;H01L21/302;H01L21/3065;H05H1/00;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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