| 摘要 |
PURPOSE: To balancedly increase the sensitivity of a whole ion, by repeating operation, wherein the sensitivity of an ion having the smallest number of a count of a detected ion is made the measured sensitivity at the point, while changing parameter, and making a measured point, where measured sensitivity becomes the maximum value, is adopted as the optimum reachable value for lens parameter. CONSTITUTION: At first, when the reachable target values of each sensitivity of respective ions Li, Y, and T1 are set by a sensitivity setting part 22, each lens parameter (LP) of four points is set by a control part 20. Then, in the control part 20, the LP is given to a drive part 30, plural ions are measured under the condition of the LP, and operation; wherein the sensitivity of an ion, having the smallest number of the count of the detected ion in a detector 7, is adopted as the measured sensitivity at the point; is repeated while changing the LP. Finally, a measured point, where measured sensitivity is adopted as the maximum value, is adopted as the optimum reachable value of the LP. |
