MANUFACTURE OF VIBRATOR

摘要

PURPOSE: To prevent the degradation of a characteristic and the cracking of a cover by etching the worked alteration layer made by a sand-blast and eliminating the layer. CONSTITUTION: A diaphragm 1 has a tongue piece shaped vibration part 7 in the holding part by first and second covers 2 and 3. On the surface and rear surface of this vibration part 7, electrodes 8 and 9 for vibration proof are formed. On the side of the vibration part of the covers 2 and 3, recessed parts 2a and 3a are formed. These recessed parts 2a and 3a are formed by further eliminating the surfaces of the recessed parts 2a and 3a up to the depth corresponding to at least one-third of the average grain diameter of abrasive grains to be used for a sand-blast by an etching after the recessed part shapes are formed by the sand blast.