| 摘要 |
PROBLEM TO BE SOLVED: To provide the M×N thin film actuated mirror arrays which is used for a light projection system and for applying a bias signals to the respective thin film actuated mirrors individually. SOLUTION: The M×N thin film actuated mirror arrays 300 includes an active matrix including a substrate having an array of M×N connection terminals 214 and 215 and an array of M×N transistors(TR) and an array of M×N driving structures which each have a driving part and a light reflection part, and each driving part has a 1st thin-film electrode, an electrically deformable thin film part, a 2nd thin-film electrode, an elastic part, and 1st and 2nd conduits 226 and 227; and each driving structure 200 has the 1st thin-film electrode of a 1st part connected individually and electrically by a bias source, and each driving structure 200 is electrically separated from other driving structures positioned in the same column in the array so that a bias signal and an electric signal are applied to the respective actuated mirrors 301 individually. |
