HEATING ELEMENT FOR VAPOR GROWING APPARATUS

摘要

PURPOSE: To prevent the generation of particles by suppressing erosion as much as possible by forming at least the specific ratio of the surface of a silicon carbide film of a crystal having a grain size in a specific range. CONSTITUTION: A hollow cylinder 11 extending upward is mounted on the lower surface of a base 10, and a heater support 12 is mounted at the upper end. A heater 16 is mounted at the support 12 via an insulating rod 13, a reflecting plate 14 and an insulating rod 15. A heating element is formed of a carbon base material and a silicon carbide film provided on the surface of the base material, and at least 80% of the silicon carbide film present on the surface is made of crystal having a grain size of 20 to 100μm. Thus, biting along the crystal magnetic field present on the surface can be effectively prevented.