MANUFACTURE OF SILICON OXIDE FILM,申请号JP19950157586-传众专利搜索

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发明名称	MANUFACTURE OF SILICON OXIDE FILM
摘要
申请公布号	JPH098030(A)	申请公布日期	1997.01.10
申请号	JP19950157586	申请日期	1995.06.23
申请人	SONY CORP	发明人	HASEGAWA TOSHIAKI
分类号	C23C16/40;H01L21/316;H01L21/768;(IPC1-7):H01L21/316	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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