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发明名称
Halbleitereinrichtung
摘要
申请公布号
DE19625670(A1)
申请公布日期
1997.01.09
申请号
DE19961025670
申请日期
1996.06.26
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
SHIMIZU, MASAHIRO, TOKIO/TOKYO, JP
分类号
H01L27/108;(IPC1-7):H01L27/108;H01L21/18
主分类号
H01L27/108
代理机构
代理人
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