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发明名称
Verfahren zur Herstellung eines Bauelementes mit porösem Silizium
摘要
申请公布号
DE59304593(D1)
申请公布日期
1997.01.09
申请号
DE19935004593
申请日期
1993.09.14
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
STENGL, REINHARD, DR., D-86391 STADTBERGEN, DE;HOENLEIN, WOLFGANG, DR., D-82008 UNTERHACHING, DE;LEHMANN, VOLKER, DR., D-80689 MUENCHEN, DE;SPITZER, ANDREAS, DR., D-85521 OTTOBRUNN, DE
分类号
H01L21/306;H01L33/00;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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