Neutral particle beam irradiation apparatus,申请号GB19960023747-传众专利搜索

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发明名称	Neutral particle beam irradiation apparatus
摘要
申请公布号	GB9623747(D0)	申请公布日期	1997.01.08
申请号	GB19960023747	申请日期	1996.11.14
申请人	NEC CORPORATION	发明人
分类号	C23F4/00;H01L21/302;H01L21/304;H01L21/3065;H05H3/02	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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