Electrostatic substrat holder,申请号EP19910400977-传众专利搜索

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发明名称	Electrostatic substrat holder
摘要
申请公布号	EP0452222(B1)	申请公布日期	1997.01.08
申请号	EP19910400977	申请日期	1991.04.11
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE	发明人	DAVIET, JEAN-FRANCOIS;JEUCH, PIERRE;PECCOUD, LOUISE;RENARD, PIERRE
分类号	H01L21/683;(IPC1-7):H01L21/00;H02N13/00	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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