| 摘要 |
A detector circuit (32) for controlling an RF match circuit (36) that receives an RF power signal from an RF source (10) and delivers the RF power signal to a load (20,25). The RF match circuit includes a first variable reactance element (C1) which is controlled by a first control signal and a second variable reactance element (C2) is controlled by a second control signal. The detector circuit includes a dual directional coupler (50) which generates a forward signal (52) that is proportional to RF power delivered to the match circuit and a reflected signal (54) that is proportional to RF power reflected back from the RF match circuit. The detector also includes a first branch circuit (52) receiving the reflected signal and producing a first and second output signal (58a, 58b) therefrom and a second branch circuit (54) receiving the forward signal and producing a first and second output signal (62a, 62b) therefrom. The detector further includes a first phase detector (64) receiving the first output signals of the first and second branch circuits and generating a first phase detection output signal from which the first control signal is derived; and a second phase detector (68) receiving the second output signals of the first and second branch circuits and generating a second phase detection output signal from which the second control signal is derived. <IMAGE> |
