| 摘要 |
<p>A three way switching controller (1) for handling high purity gas, and the like, used for a semiconductor manufacturing plant, and the like, prevents lines on switching sides thereof from communicating with each other at time of switching. The three way switching controller includes a body (2), first and second valves (3 and 4), a cylinder (5), and a linking mechanism (6), with the linking mechanism including a disengagement device (7). The cylinder, operating through the linking mechanism, alternately opens and closes normally-closed valves. The disengagement means prevents a driving force of the cylinder from being applied at once to the valves upon initiation of operation of the cylinder, thereby allowing both of the valves to be in a free state (closed state). <MATH></p> |
