发明名称 Verfahren zum Schneiden eines Musters in einer Kunststoffschicht
摘要 <p>1,274,305. Cutting; heated cutter for plastics. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. 5 June, 1969 [8 June, 1968], No. 28563/69. Headings B4B and B5A. In producing a pattern in a multilayer plate 1, 3, e.g. for cutting out portions of an outer synthetic foil 3 in photomask production, at least that portion 39 of a cutting tool entering the foil 3 is substantially circular in section in planes parallel to the foil area being cut, the foil 3 being heated during cutting by an external source 45 close to the cutting point. A diamond cutting tips brazed to a copper part 37 and heated by electric means 45-53 may project through an apertured guide foot 21 of a holder 19. A ceramic tube 35 connects the tool to an axially adjustable pin 29 and hence to a vertical shaft (57), Fig. 4 (not shown), supported at the centres of diaphragms (59), (61) of a coaxial housing (63), in turn supported in an arm (65) of a numerically controlled drawing machine. Alternatively, the heat source may comprise ultrasonic means.</p>
申请公布号 DE1927928(A1) 申请公布日期 1969.12.11
申请号 DE19691927928 申请日期 1969.05.31
申请人 N.V. PHILIPS' GLOEILAMPENFABRIEKEN 发明人 GERARDUS GIJSBERS,THOMAS;JOSEPH LEBLANS,LEOPOLD MICHAEL LAMBERT;CORNELIS DANIELS,HENRICUS PETRUS
分类号 B05C17/06;B26F3/08;B43L13/00;G03F1/00;H01L21/027 主分类号 B05C17/06
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