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发明名称
Process for preparing a thin film semiconductor device
摘要
申请公布号
EP0461362(B1)
申请公布日期
1997.01.08
申请号
EP19910106048
申请日期
1991.04.16
申请人
CANON KABUSHIKI KAISHA
发明人
SHINDO, HITOSHI
分类号
G02F1/136;G02F1/1368;H01L21/336;H01L21/762;H01L27/12;H01L27/146;H01L29/78;H01L29/786;(IPC1-7):H01L29/772
主分类号
G02F1/136
代理机构
代理人
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