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发明名称
FORMATION OF THIN FILM OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH093631(A)
申请公布日期
1997.01.07
申请号
JP19950178100
申请日期
1995.06.21
申请人
SONY CORP
发明人
TAHIRA YUICHI
分类号
C23C14/22;H01L21/203;H01L21/285;(IPC1-7):C23C14/22
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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