| 摘要 |
<p>PURPOSE: To safely remove harmful components even if there is air component without causing abnormal temperature rise or generation of NOx and also to simplify the process to miniaturize a processing device. CONSTITUTION: A soda-lime in the form of granules or powder is provided, and the soda-lime, in a heated state, is brought into contact with NF3 gas or gas containing NF3 gas to decompose the NF3 gas so that the decomposed products of the NF3 gas can be adsorbed.</p> |
