| 摘要 |
PURPOSE: To perform the low temperature plasma treatment of long sheets effectively and continuously by arranging multiple sets of seal devices from the outside end to the low temperature plasma treatment chamber at specified intervals and connecting a vacuum tube in those spaces which are formed between a pair of seals in the seal tube. CONSTITUTION: Each of seal mechanisms 9 in a seal tube 7 comprises a pair of seal rolls 8A and 8B pressed against each other, a seal plate 10 to maintain airtightness between their peripheral surfaces and end surfaces and the inner surface of the seal tube 1, and a seal end surface plate 23. In addition, these seal mechanisms 9 are arranged in the seal tube 7 axially from the outer end part of the seal tube 7 to a low temperature plasma treatment chamber in such a manner that multiple mechanisms are arranged at specified intervals. Also the seal device is installed at the opening part of the cloth introducing outlets 3 and 4 of the low temperature plasma treatment cloth chamber. By these both seal devices, the degree of vacuum suitable for excitation of low temperature plasma can be maintained in the low temperature plasma treatment chamber. |
