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发明名称
PVD DEVICE
摘要
申请公布号
JPH093639(A)
申请公布日期
1997.01.07
申请号
JP19950157853
申请日期
1995.06.23
申请人
APPLIED MATERIALS INC
发明人
TANAKA YOICHIRO
分类号
C23C14/34;C23C14/35;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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