Micro-gripper for micro-assembly with substrate and microstructure body

摘要

The transfer points receiving the force following a voltage application are designed as bending joints (6,7,8,9), which are elastically deformed as a result. The force or the movement is so transferred with a translation ratio at the driven elements i.e. the gripper arms (2,3), that these move away from each other or move together. The gripping jaws of the micro-gripper are provided with V shaped elements. The gripping jaws are equipped with sensor components. The gripping surfaces are coated with piezoelectrical material, by means of which the gripping force can be converted in to electrical signals. The gripping arms are provided with electric conducting paths.