Verfahren und Vorrichtung zur Bestimmung der Dicke und/oder des komplexen Brechungsindexes dünner Schichten und Verwendung zur Steuerung von Beschichtungsverfahren

摘要

The invention concerns a method and device for determining the thickness of one or more thin layers and for determining their complex refractive index, the layers in question being applied to substrates for the purpose of endowing them with new properties. The invention also concerns the use of the said method and device for controlling the coating process. The aim of the invention is to ensure simplicity of operation, facilitate measurement of multiple layer systems in this form, and to create the possibility of carrying out measurements in situ and using the measurements obtained to control the coating process. The problem addressed by the invention is solved by the virtually simultaneous wavelength- and polarisation-resolved measurement of the light reflected and transmitted by the coated substrate.