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发明名称
BATCH LOADING SYSTEM FOR CVD
摘要
申请公布号
EP0750688(A1)
申请公布日期
1997.01.02
申请号
EP19950913951
申请日期
1995.03.17
申请人
SANDVIK AKTIEBOLAG
发明人
NORRGRANN, TOR;PALSSON, KJELL;LJUNGBERG, BJOERN;HESSMAN, INGEMAR
分类号
B23B27/16;C23C16/44;C23C16/458;(IPC1-7):C23C16/44;C23C16/00
主分类号
B23B27/16
代理机构
代理人
主权项
地址
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