| 发明名称 |
Infrared detection device comprising a pyroelectric thin film and method for fabricating the same |
| 摘要 |
An infrared detection device has a substrate with a plurality of hollow mesas and a pyroelectric thin film formed on the surface having the mesas.
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| 申请公布号 |
US5589687(A) |
申请公布日期 |
1996.12.31 |
| 申请号 |
US19950413958 |
申请日期 |
1995.03.30 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
KAWATA, SATOSHI;DOHI, MASAJI;SAKACHI, YOICHIRO;DAIKU, HIROSHI |
| 分类号 |
G01J1/02;G01J5/34;H01L37/02;(IPC1-7):G01J1/02 |
主分类号 |
G01J1/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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