发明名称 |
Container for liquid metal organic compound |
摘要 |
A metal organic compound container apparatus for containing a liquid metal organic compound, receiving a carrier gas, and producing a carrier gas stream saturated with vapor of the metal organic compound including a container for containing a liquid metal organic compound; an inlet pipe for introducing a carrier gas into the container, the inlet pipe having an end for immersion in the metal organic compound; a carrier gas flow rate controller for controlling carrier gas flow into the inlet pipe; a first exhaust pipe for exhausting carrier gas from the container at a first flow rate, the first exhaust pipe having an end not contacting the metal organic compound; a first gas flow rate controller for controlling one of pressure and the first flow rate of the carrier gas through the first exhaust pipe; a second exhaust pipe for exhausting carrier gas from the container at a second flow rate, the second exhaust pipe having an end not contacting the metal organic compound; and a second gas flow rate controller for controlling the second flow rate.
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申请公布号 |
US5589110(A) |
申请公布日期 |
1996.12.31 |
申请号 |
US19950533462 |
申请日期 |
1995.09.25 |
申请人 |
MOTODA, TAKASHI;KARAKIDA, SHOICHI;KANENO, NOBUAKI;KAGEYAMA, SHIGEKI |
发明人 |
MOTODA, TAKASHI;KARAKIDA, SHOICHI;KANENO, NOBUAKI;KAGEYAMA, SHIGEKI |
分类号 |
C30B35/00;C23C16/448;C30B25/14;H01L21/205;H01L21/365;(IPC1-7):B01F3/04 |
主分类号 |
C30B35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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