发明名称 Magnetoresistive thin-film and device
摘要 Disclosed is a magnetoresistive thin-film, which a (110) oriented epitaxial buffer layer 2 made of a body-centered cubic crystalline metal or alloy is formed on a single crystalline substrate 1, thereon with layer a (110) oriented epitaxial Fe/Cr superlattice film on which Fe layers 3 and Cr layers 4 alternately are epitaxially grown, the Fe/Cr superlattice having a structure in which staircase facets which have ridge lines to the <100> direction at (110) surface and have {100} side surfaces stand side by side to the <110> direction. The dispersion of the widths of the staircase facets falls within +/-50%. Also disclosed is a magnetoresistive device which is provided with the above magnetoresistive thin-film and a means for applying a magnetic field parallel to the ridge lines of the staircase facets to the thin-film.
申请公布号 US5589278(A) 申请公布日期 1996.12.31
申请号 US19950498389 申请日期 1995.07.05
申请人 NEC CORPORATION 发明人 KAMIJO, ATSUSHI
分类号 G01R33/09;G11B5/39;H01F10/08;H01F10/32;H01L43/08;H01L43/10;(IPC1-7):G11B5/66 主分类号 G01R33/09
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