Soft magnetic thin film

摘要

A soft magnetic thin film is fabricated by depositing metallic particles obliquely on a substrate. The sign and magnitude of the crystalline magnetic anisotropy of the soft magnetic thin film are selected to cancel out the shape magnetic anisotropy depending on an inclined columnar crystalline structure and the stress-induced magnetic anisotropy. The soft magnetic thin film has a reduced total magnetic anisotropy. A magnetic head incorporating the soft magnetic thin film has good recording and reproducing characteristics and high saturation magnetic characteristics.