| 摘要 |
<p>A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent onoff valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.</p> |
| 申请人 |
OHMI, TADAHIRO;FUJIKIN INCORPORATED |
发明人 |
OHMI, TADAHIRO;HIRAO, KEIJI;YAMAJI, MICHIO;ITOI, SHIGERU;SHINOHARA, TSUTOMU;IKEDA, NOBUKAZU;KOJIMA, TETSUYA;MOROKOSHI, HIROSHI |
