发明名称 High precision piezoelectric actuator
摘要 <p>The actuator comprise a support (10a,10b) and a number of piezoelectric transducers (4a,4b,5a,5b) solidly attached to the support. These are deformable in a scissors action under the action of control voltages. A pushing element is coupled to the object to ensure that the displacement of the transducers is conveyed to the moving object. This is achieved by friction between the transducer surfaces and the rod (3) to be moved. An electrical generator (2) produces the control voltages required in saw-tooth wave form in order to actuate the transducers and produce the necessary movement. An overall control (15) sends signals to individual generators (13a,b,14a,b) in order to activate each of the piezoelectric elements.</p>
申请公布号 EP0750356(A1) 申请公布日期 1996.12.27
申请号 EP19960401359 申请日期 1996.06.20
申请人 CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE S.A. 发明人 NIEDERMANN, PHILIPPE;CHOFFAT, HUBERT
分类号 H01L41/09;(IPC1-7):H01L41/09;H02N2/02 主分类号 H01L41/09
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