| 摘要 |
In order to form deposits of AlOx or of anothermetal oxide on plastic films, vapours of the component substances of the layer to be deposited and a gas such as oxygen or an oxygen-containing gas are introduced, which gas collides with the flow of vapours directed upon the film on which they are to condense; for the introduction of the gas, ionizers are provided which introduce the gas predominantly in the form of plasma generated in hollow cathodes. <IMAGE> |
