,申请号JP19880090756-传众专利搜索

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发明名称
摘要
申请公布号	JP2568104(B2)	申请公布日期	1996.12.25
申请号	JP19880090756	申请日期	1988.04.13
申请人	TOKYO ELECTRON LTD	发明人	ITOYAMA TAKETOSHI
分类号	G01R31/28;H01L21/66;(IPC1-7):G01R31/28	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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