| 摘要 |
PROBLEM TO BE SOLVED: To increase current capacity and enhance discharge efficiency of a cathode in a discharge device by forming a plurality of microholes having the specified cross section area on the cathode surface facing an anode. SOLUTION: In a discharge device supplying electric energy from a power source 18 to a cathode 10 and an anode 12 arranged in a discharge chamber 14 in which gas of 0.1 Torr or atmospheric pressure is sealed, a plurality of microholes 20 of diameter D having cross section dimension necessary for keeping discharge are formed in the cathode 10. Electrons radiated from the cathode surface of the microholes are accelerated in a cathode drop region toward an axis line 24, enter a cathode drop region on the facing side of the axial line 24, are reflected, cross again the axial line 24, and are accelerated to generate vibration motion of electrons. Electrons are released by almost all energy through excitation collisions and ionization collisions, a high plasma density is generated on the side of a discharge axial line within the microhole to produce high current. The discharge parameter varies with the product of pressure P within the discharge chamber and hole diameter D, and P.D=0.1-10 Torr.cm is preferable. |
