| 摘要 |
PURPOSE: To provide a treatment equipment which can give surface smoothness to a workpiece retaining part without complicated working, prevent generation of dust in the retaining part and adhesion of dust to the workpieces, and improve yield of the objects to be treated. CONSTITUTION: A treatment equipment has a retaining part 10 which supports workpiece W in the process for carrying the workpiece W between a vessel 3 accommodating a plurality of the workpiece W and treatment chambers 27A-27C for applying specified treatment to the workpiece W. The retaining part 10 is formed by using pore-free material having very few pores. Thereby surface smoothness can be given to the workpiece retaining part 10 without necessitating complicated working, and generation of dust in the retaining part 10 and adhesion of dust to the workpieces can be prevented, so that the yield can be improved. |
