摘要 |
PURPOSE: To provide a piezoelectric element in which piezoelectric material layers whose dimension, composition, and density are controlled in high precision are formed directly on an optional surface of a narrow cylindrical base and a method for making the piezoelectric element. CONSTITUTION: A piezoelectric element has a base of a hollow metal cylinder 1 and is equipped with piezoelectric material layers 2, 3 which are formed directly on the inner surface, outer surface, or both surfaces of the cylinder 1. In the manufacturing method of the element, by a hydrothermal synthetic method in which the main component of the cylinder 1 is made one element to be reacted in the presence of water of high temperature and high pressure, the piezoelectric material layers 2, 3 are formed directly on the surface of the metal cylinder 1 through a nucleus formation process and a crystal growth process. |