发明名称 PIEZOELECTRIC ELEMENT AND MANUFACTURE THEREOF
摘要 PURPOSE: To provide a piezoelectric element in which piezoelectric material layers whose dimension, composition, and density are controlled in high precision are formed directly on an optional surface of a narrow cylindrical base and a method for making the piezoelectric element. CONSTITUTION: A piezoelectric element has a base of a hollow metal cylinder 1 and is equipped with piezoelectric material layers 2, 3 which are formed directly on the inner surface, outer surface, or both surfaces of the cylinder 1. In the manufacturing method of the element, by a hydrothermal synthetic method in which the main component of the cylinder 1 is made one element to be reacted in the presence of water of high temperature and high pressure, the piezoelectric material layers 2, 3 are formed directly on the surface of the metal cylinder 1 through a nucleus formation process and a crystal growth process.
申请公布号 JPH08336967(A) 申请公布日期 1996.12.24
申请号 JP19950147041 申请日期 1995.06.14
申请人 FUJI ELECTRIC CO LTD 发明人 UCHIDA SHINJI;FUKAZAWA NAOTO
分类号 B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;C04B35/49;C04B35/491;C30B7/10;H01L41/09;H01L41/187;H01L41/39 主分类号 B41J2/045
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