POLYIMIDE PRECURSOR AND ITS PRODUCTION, POLYIMIDE AND ITS PRODUCTION, PHOTOSENSITIVE RESIN COMPOSITION, PRODUCTION OF POLYIMIDE PATTERN, AND PRODUCTION OF SEMICONDUCTOR ELEMENT

摘要

PURPOSE: To obtain a polyimide precursor which has a high (i)-ray transmission and enables a good pattern shape to be formed with an (i)-ray stepper by using a polyimide precursor having specific repeating units. CONSTITUTION: A photosensitive polyimide precursor which has a high (i)-ray (wavelength: 365nm) transmission and enables a good pattern shape to be formed with an (i)-ray stepper is obtd. by using a polyimide precursor having repeating units represented by formula I [wherein R<1> is a tetravalent org. group; and R<2> is a group represented by formula II (wherein R<3> , R<4> , R<5> , and R<6> are each H or a monovalent org. group provided at least two of them are monovalent org. groups)] as the base polymer.